| Contact Us |

Silicon Carbide(SiC)

SiC Parts

12”Quixace Boat, 12”Inner Tube, 8”Tube, 12”Oxide Boat, Upper Ring, Baffle, PEC, Holder Cap

Benefits

· Core Bonding Technology

· CVD Coating Technology

· Reduced Coating Thickness Variation

· Excellent Step Coverage

 

SKC Solmics has secured the SiC CVD Coating technology for our boats and tubes, which has effectively eliminated the main cause of particle contamination due to the tube corrosion. 

Also, the ring type jig and cathodes for etch process have been replaced with SiC which has significantly improved the lifetime as well as reduce the cost.  Its anti-corrosiveness and high thermal conductivity characteristics has made SiC one of the most promising materials in the semiconductor industry.

CVD-SiC Coating Comparison

Solmics CVD-SiC Coating Benefits

| Home |

| Products |

| Technology |

| About Us |

| Contact Us |