ESC (Electro Static Chuck)

We provide spare parts for ESC or refurbish your old one to as new condition.

· AMAT: Ultima, DPS, DPS2, e-max, super-e, MxP, MxP+, Producer

· LAM: 4500, 2300, 9400 and 9600 series

· Novellus: Speed

· TEL: DRM and SCCM (Ceramic Coated and Ceramic Plated)

· Varian

· Hitachi

· Trikon

· Ulvac

New ESCs and Refurbishments will be tested for:

· Ultra Sonic imaging of plate and bonding

· Flatness

· Dimple Height

· Dimension

· He Leak Rate

· Withstanding Voltage

· Chucking/Dechucking

| Home |

| Products |

| Technology |

| About Us |

| Contact Us |