Heater

We provide spare parts for 200mm and 300mm heaters or refurbish your old one.

· AMAT WxZ, DxZ, TxZ and Endura

· Novellus: C1/C2 Sequel, Altus and Vector

· Gasonics Platen

New Heaters and Refurbishments will be tested for:

· Dimensions (Flatness, Diameter, Thickness, and Groove depth).

· Electrical (Insulation/Heater Resistance and Withstanding Voltage)

· He Leak Test        

· Temperature Trend by Pressure

· Temperature Ramp-Up Trend

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