Magnetic Seal Refurbishment

Magnetic (ferro-fluidic) seal is equipment that functions as O-ring between Pole piece and Shaft.  Ferro fluidic seal and Ferro fluidic feed are the same.  The magnetic sealing system is non-friction unlike O-ring so it decreases contamination by powder and wear on equipment.

Application for magnetic fluidic seal:

· Wafer growing equipment

· Semiconductor process equipment

· LCD process equipment

· Solar cell

 

Common Application Specifications

· Ultimate vacuum : 10ˉ6 Pa(10ˉ8 Torr)

· Helium leak rate : Less than 1.3 x 10ˉ12 Pa·m³/sec(10ˉ11 Torr·ℓ/sec)

· Differential pressure : 2.5kg/cm²(2.5atmosphere)

· Operating temperature : 0℃ to 100℃

· Gas compatibility : Active and Reactive Gas

· Materials of housing and shaft : SUS303, SUS304, and SUS630

OEM Replaceable With

TEL, Varian, Jusung, Ulvac, AMAT, Hitachi, Novellus

Benefits

· Improved vacuum seals vs. OEM o-ring design

· Reduce cost of ownership

· Extended Life Time (More than 10 times)

· Improvement of throttle valve structure design

· Easier maintenance

Process of Overhaul

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