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Refurbishment

SKC Solmics USA is moving towards refurbishment services to meet the current market demands of the semiconductor equipment market for cost-saving refurbishment products.    We have partnered with Yerico Manufacturing company to establish a new system so that we may provide our customers with high quality, short lead time refurbishment services. 

Al2O3 parts

SKC Solmics has secured Slip Casting and CIP (Cold Isocratic Pressing) technology for mass production of high purity (99.8%) ceramic products such as focus ring, edge ring, ring confinement cap, etc.  Due to the mass production and customization, our ceramic products ensure high performance with reasonable price that meet every customer’s needs.

Silicon parts

SKC Solmics is the number one manufacturer of semiconductor silicon parts in South Korea and it has expanded its proven technology worldwide.  The excellence of the silicon parts is due to Solmics’ advanced polishing and etching processes as well as production of silicon ingots.  Our semiconductor silicon parts include focus rings, edge rings, source rings, inner rings, heat shields, etc. 

Si-SiC parts

Our highly pure Si-SiC tubes and boats have been stabilized in high temperatures over 1,200℃ using an ultra-pure reaction sintering method, which significantly contributes to the improvement of the semiconductor diffusion process and LPCVD processes.  It has also made 300mm wafer heat treatments highly pure and heat resistant.

Quartz part

Quartz parts have high purity, electric insulation, low expansion and less gas content as well as 20~1,000℃ specific heat and 0~100(1.3~1.5 w/mk) ℃   conductivity.  SKC Solmics has secured a uniquely technologically precise process for our quartz spare parts such as focus rings, 2-step rings, belljars, boats, tubes, caps, etc. used for high capacity wafer integration.