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| |
 | Objective
: Provide Refurbish service with High performance and second source parts |
| |
 | Set-up |
|
Relocation | | Conversion
(6"->8") | | Modification/Up-grade
| | | Benefits
: | | | |
| Lower
COO | |
Fast service time | | Don't
need to buy new tool | | | Tool
coverage : | |
|
| Stepper
- Cannon, Nikon, ASML (UT Stepper) | |
Track - TEL, DNS | |
Implanter - Eaton, Varian | |
AMAT - P-5000 CVD, P-5000 ETCH, | | C-5200
CVD, C-5200 HTF (Poly),C-5200 ETCH | |
TEL - 480, 580, TE5000, TE8500, DRM | |
LAM - All Models | |
Wet - SUGAI, KAIJO | |
CVD - AMAT All Models, Novellus All Models | |
Measurement Tool - Hitachi, Joel | |
Diffusion - Termco furnace, TEL furnace, KAIJO Furnace | |
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Copyright
© 2003 SNT-USA, Inc. All rights reserved. |
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