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Ceramic Parts in Semiconductor Industry
High Purity Alumina Products

Product name Product usage and instructions
Focus Ring
Although used similarly with the Si Focus Ring for its plasma placing and insulation performance, it is used in the semiconductor manufacturing equipment industry that has higher demand for insulation capabilities than for its high degree of purity
Edge RingUsed similarly with Si Edge Ring for its wafer placement and plasma stabilizing capabilities, it is used for semiconductor manufacturing equipment that requires insulation capabilities.
Ring Confiment CapIt plays a role in removing pressure in the plasma, and it is used for outside part of the Si electrode located in the upper part of the chamber.
Other products
Guide Ring, Rotation Ring Cover, Wafer Chuck, Wafer Clamp, Robot Arm, Robot Blade, Hot Arm, Cold Arm, Ceramic Pipe, Lift Pin, Ceramic Screw..etc.

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