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Electrodes (for Memory, ASIC, FPD., etc.)
Process Chamber
Shields
Arcing CVD System
Versatile Chuck Robot
Auto Loader System

Electrodes
Wonil is supplying electrodes, showerheads, FPD compatible electrode, heater employed electrode that have passed fully the manufacturing reliability test, which provide the productivity and yield improvement.


Shields >>  
  <<Chamber units



AL Anodizing Part for Etch

Wall Liner Wall Liner

SSGD Top LId Slit Valve Liner

Upper Electrode Plate Baffle

Shield Part for Sput


CLR Upper Shield CLR Lower Shield

Upper Shield Lower Shield

Collimator


Copyright © 2003 SNT-USA, Inc. All rights reserved.
Spare Parts
 
Ceramic
Silicon
Quartz
Aluminum
SIC Dummy Wafer
Engineering Plastics - O-Rings
Heater Blocks
Sequel Heater Blocks
ESC Switching (Polymide - Ceramic) 
Upgrade Stepper& Scanner chuck
Tool Refurbishments
 
Ceramic ESC Refurbishment
Maintenance & Services