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8" Forged heater block
6" Al heater block
LCD Al heater block ( 370 X 470 glass )
8" Inconel heater block ( JUSUNG ENG )
12" Inconel heater block ( IPS )
12" Al heater block ( COSAM )
8" Al heater block ( Gasonics )
8" Al heater block ( DAS-III )
Out line heater
Valve heating block heater
In line heater ( quartz )








6 Inch CVDW Heater Block 사양서
...... 6" CDVW ...... 160V, 1600 W
OEM Part No 0010-03346 ...... 21.5 W
........... P-5000 Sheath... Inconel
...maker AMAT Block... Aluminium
...... CVDW ...... 500..
wafer 6 inch ..uniformity 1%...(9 point)
warranty 1 Year Leak rate 1x10-8 torr°l/sec
...... Connector-Type ...... None
 

Plus Heater Block 사양서

...... Plus heater block ...... 160V, 1200 W
OEM Part No 0010-04542 ...... 21.5 W
........... P-5000 Sheath... Inconel
...maker AMAT Block... Aluminium
...... CVDW deposition ...... 500..
wafer 8 inch ..uniformity 1%...(9 point)
warranty 1 Year Leak rate 1x10-8 torr°l/sec
...... Connector-Type ...... None
 

 

FORGED (Dxz) Heater Block 사양서

...... FORGED (Dxz)  ...... 208V, 2800 W
OEM Part No 0010-05257 ...... 15 W
........... CENTURA, P-5000 PRODUCER Sheath... Inconel
...maker USG, BPSG, PSG Block... Aluminium
...... CVDW deposition ...... 500..
wafer 8 inch ..uniformity 2%...(9 point)
warranty 1 Year Leak rate 1x10-8 torr°l/sec
...... -Type ...... Anodizing
 

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