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| Quartz Products in Semiconductor Industry |
| Quartz
Products | | | |
Product
name
| Product
name/ product information | | *Focus
Ring | Helps
the plasma to gather in the correct location after it has been formed in the Chamber.
Recently, it has partially been substituted by the use of Si Focus Ring.
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| *Bell
jar | Shapes
the plasma forms by transmitting microwaves | | *Boat | Used
during heat oxidization diffusing CVD (Chemical Vapor Deposition) process, and
as a tool for transferring the wafer during the process. |
| *Tube | Used
during oxidation formation or diffusion process, and it is used to wrap Boat type
products as a Quartz reactor. | | *Cap | A
product that holds up Quartz and plays a heat-retention role to avoid any heat
loss internally. | *Bath
| Square
container used during Wafer cleaning process and etching process which helps to
eliminate any damages. | | *Other
products | Wide
Pocket, Shadow Ring, Base Plate, Lifter Pin, Shield Ring...etc |
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| Q'TZ WALL COVER | BASE
PLATE Q'TZ |
| Other
Products | | | | |
DIVISION
| APPLICATION
| PRODUCTS |
| *Focus
Ring | For
Semiconductor | Plate
insulator,Source filament insulator,Insulator filament, Deflector insulator, Insulator(outer),
Beam monitor insulator,Base plate insulator,Insulator washer,Insulator shoulder,Etc
| | *Bell
jar | For
Semiconductor | Plate,Pin,Screw,Bar,Outer
heater,Inner heater | | *Boat | For
Semiconductor | Clamp
post ,Zirconia Back Up Tool.
Clamp post pin
Sleeve |
| *Tube | For
Semiconductor | Ashing
plate
Wider Pocket
Cover ring | |
Copyright
© 2003 SNT-USA, Inc. All rights reserved. |
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