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| NOVELLUS
SEQUEL HEATER BLOCK |
 |  | New
& Refurbished Heater Block
- Cost reduction
- Excellent flatness
- Good temperature Uniformity
- Warranty: 1 year (new), 6 months
(Refurbishment)
- Lead time: 3 Weeks ARO (Available Buffer
Stock)
| | General
Information | | Description | 6" | 8" |
| Weight | 55
kg | 61
kg |
| Materials | AL
6061 | AL
6061 |
| Heater
materials | Inconel | Inconel |
| Temp.
uniformity | 2.50% | 2.50% |
| Flatness
(mm) | "+-
0.05 | "+-
0.05 |
| Heater
register | 2
kw: 7.2 ohm | 2
kw: 7.2 ohm |
| 3
kw: 5.1 ohm | 3
kw: 5.1 ohm |
| |
Products List | | 6" | 8" | | P/N | Ref.
No. | P/N | Ref.
No. | | H-0037 | 19-032015-01 | H-0033 | 19-024227-01 | | H-0038 | 19-032015-00 | H-0034 | 19-024227-00 | | H-0039 | 19-00155-01 | H-0035 | 19-00154-01 | | H-0040 | 19-00155-00 | H-0036 | 19-00154-00 | | H-0041 | 19-027038-00 | H-0042 | 19-027038-01 | | | | |
Dimension Spec (8"
Heater
Block)
Unit: Inch | | POSITION | A | B | C | D | E | F | G | H | I | J | K | | DESIGNED | 2.9 | 0.37 | 0.36 | 2.13 | 3.61 | 3.66 | 4.2 | 2.5 | 29 | 22.6 | 9.6 | | SIZE | | | | | | | | | | | | | TOLERANCE | ±
0.02 | ±
0.02 | ±
0.02 | ±
0.02 | ±
0.02 | ±
0.02 | ±
0.039 | ±
0.012 | ±
0.039 | ±
0.02 | ±
0.02 | | Copyright
© 2003 SNT-USA, Inc. All rights reserved. |
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