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| Silicon
Spec | | | | | Material | Single-Crystalline
Silicon Ingot | | Growth
Method | CZ |
| Type | P |
| Dopant | Boron |
| Orientation | 1-0-0 |
| Resistivity | 1-5
Ohm Cm | | Carbon
Contents | Max.
1.0 ppma(New ASTM) | | Slip | free |
| Crack | free |
| Chip | free |
| Pin Hole | free |
| Borken | free |
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| Silicon
Products | | | |
| Si Focus Ring | Product information |
| *Si Focus Ring | Helps the plasma to gather in the correct location
after it has been formed in the Chamber.
| | *Si Edge Ring | Precisely
aligns the wafer and supports the Si Focus Ring by stabilizing the plasma. |
| Si Electrode | Helps to evenly spray various gases onto the Si
Wafer's surface during the surface finishing stage. | | Other
products | Si Source Ring, Si Inner Ring, Si Slab, Si Heat Shield..etc |
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Copyright
© 2003 SNT-USA, Inc. All rights reserved. |
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